Invention Grant
- Patent Title: Imaging optical system and related installation and method
- Patent Title (中): 成像光学系统及相关安装及方法
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Application No.: US12758530Application Date: 2010-04-12
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Publication No.: US08558991B2Publication Date: 2013-10-15
- Inventor: Hans-Juergen Mann
- Applicant: Hans-Juergen Mann
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007051669 20071026
- Main IPC: G03B27/54
- IPC: G03B27/54
Abstract:
An imaging optical system can image two object fields, each in the same object plane, into two corresponding image fields, each in the same image plane. The two object fields are spatially separated from each another, and the two image fields are spatially separated from each other. The imaging optical system can exhibit increased flexibility of use.
Public/Granted literature
- US20100231884A1 IMAGING OPTICAL SYSTEM AND RELATED INSTALLATION AND METHOD Public/Granted day:2010-09-16
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