Invention Grant
US08559019B2 Apparatus and method for measuring displacement, method of making die for molding optical element, and optical element 失效
用于测量位移的装置和方法,用于模制光学元件的模具的制造方法和光学元件

  • Patent Title: Apparatus and method for measuring displacement, method of making die for molding optical element, and optical element
  • Patent Title (中): 用于测量位移的装置和方法,用于模制光学元件的模具的制造方法和光学元件
  • Application No.: US13343899
    Application Date: 2012-01-05
  • Publication No.: US08559019B2
    Publication Date: 2013-10-15
  • Inventor: Teppei Agawa
  • Applicant: Teppei Agawa
  • Applicant Address: JP Tokyo
  • Assignee: Canon Kabushiki Kaisha
  • Current Assignee: Canon Kabushiki Kaisha
  • Current Assignee Address: JP Tokyo
  • Agency: Canon U.S.A., Inc. IP Division
  • Priority: JP2011-003581 20110112
  • Main IPC: G02B13/14
  • IPC: G02B13/14
Apparatus and method for measuring displacement, method of making die for molding optical element, and optical element
Abstract:
A beam splitter splits a laser beam emitted from a laser light source into a first laser beam that travels toward an object and a second laser beam. The second laser beam is received by a second photodetector. The second photodetector is positioned such that the light quantity of the second laser beam incident on the second photodetector is equal to that of the first laser beam incident on a first photodetector. A position calculator calculates displacement of the object relative to the laser light source on the basis of the difference between an output of the first photodetector and an output of the second photodetector.
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