Invention Grant
- Patent Title: Thermal control of optical filter with local silicon frame
- Patent Title (中): 带有局部硅框架的滤光片的热控制
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Application No.: US13232773Application Date: 2011-09-14
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Publication No.: US08559091B2Publication Date: 2013-10-15
- Inventor: Marc Finot , Mark McDonald , Andrew Daiber
- Applicant: Marc Finot , Mark McDonald , Andrew Daiber
- Applicant Address: US NM Albuquerque
- Assignee: Emcore Corporation
- Current Assignee: Emcore Corporation
- Current Assignee Address: US NM Albuquerque
- Main IPC: G02F1/03
- IPC: G02F1/03 ; G02B5/22
Abstract:
A method comprising forming two or more frames from a first wafer, forming two or more etalons from a second wafer, disposing a resistive thermal device on each of the two or more frames, dicing the first wafer and the second wafer, and bonding each of the frames to a corresponding one of the etalons to form optical subassemblies of optical filters.
Public/Granted literature
- US20120000600A1 THERMAL CONTROL OF OPTICAL FILTER WITH LOCAL SILICON FRAME Public/Granted day:2012-01-05
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