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US08559113B2 Multi-spectral super-pixel filters and methods of formation 有权
多光谱超像素滤波器和形成方法

Multi-spectral super-pixel filters and methods of formation
Abstract:
Multi-spectral filter elements and methods of formation are disclosed. Each multi-spectral filter element may include a plurality of sub-filters that are, in some embodiments, each adapted to respond to electromagnetic radiation within respective ones of a plurality of spectral bands. A method embodiment includes forming an optical cavity layer. Volume of the optical cavity layer can be reduced in at least N−1 number of spatial regions. The reducing may include a number of selective removal steps equal to the binary logarithm function Log2 N. In this example, each spatial region corresponds to a respective one of the plurality sub-filters. The plurality of sub-filters include at least N sub-filters. In particular embodiments, the respective ones of the plurality of spectral bands may be at least partially discrete with respect to each other.
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