Invention Grant
- Patent Title: Shielding member having a charge control electrode, and a charged particle beam apparatus
- Patent Title (中): 具有充电控制电极的屏蔽部件和带电粒子束装置
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Application No.: US13196778Application Date: 2011-08-02
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Publication No.: US08563927B2Publication Date: 2013-10-22
- Inventor: Dieter Winkler , Stefan Lanio
- Applicant: Dieter Winkler , Stefan Lanio
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP11175427 20110726
- Main IPC: G21K7/00
- IPC: G21K7/00 ; G01N23/04
Abstract:
A shielding member for a charged particle beam apparatus includes a conductive substrate; and a through hole extending through the conductive substrate. The conductive substrate is comprised of a material having a specific electrical resistivity in a range from about 106 Ωcm to about 1012 Ωcm.
Public/Granted literature
- US20130026385A1 SHIELDING MEMBER HAVING A CHARGE CONTROL ELECTRODE, AND A CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2013-01-31
Information query
