Invention Grant
- Patent Title: Scanning mirror device
- Patent Title (中): 扫描镜设备
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Application No.: US13400504Application Date: 2012-02-20
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Publication No.: US08570502B2Publication Date: 2013-10-29
- Inventor: Stefan Richter , Veljko Milanovic , Günter Rudolph , Michel Stutz , Gerhard Krampert
- Applicant: Stefan Richter , Veljko Milanovic , Günter Rudolph , Michel Stutz , Gerhard Krampert
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss AG
- Current Assignee: Carl Zeiss AG
- Current Assignee Address: DE Oberkochen
- Agency: Skaar Ulbrich Macari, P.A.
- Priority: DE102011004477 20110221
- Main IPC: G01B11/26
- IPC: G01B11/26

Abstract:
There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.
Public/Granted literature
- US20120300197A1 SCANNING MIRROR DEVICE Public/Granted day:2012-11-29
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