Invention Grant
US08570502B2 Scanning mirror device 有权
扫描镜设备

Scanning mirror device
Abstract:
There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.
Public/Granted literature
Information query
Patent Agency Ranking
0/0