Invention Grant
- Patent Title: Noncontact surface shape measuring method and apparatus thereof
- Patent Title (中): 非接触表面形状测量方法及其装置
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Application No.: US13146665Application Date: 2010-01-28
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Publication No.: US08570532B2Publication Date: 2013-10-29
- Inventor: Katsuhiro Miura , Hajime Hirose , Hideo Kotajima , Takao Tsukamoto , Minoru Ishima
- Applicant: Katsuhiro Miura , Hajime Hirose , Hideo Kotajima , Takao Tsukamoto , Minoru Ishima
- Applicant Address: JP Tokyo
- Assignee: Mitaka Kohki Co., Ltd.
- Current Assignee: Mitaka Kohki Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein P.L.C.
- Priority: JP2009-021903 20090202
- International Application: PCT/JP2010/051102 WO 20100128
- International Announcement: WO2010/087391 WO 20100805
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B11/24 ; G02B7/04 ; G02B27/40 ; G02B27/64

Abstract:
Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is added to an actual position of an objective lens in an up-down direction, to calculate a movement amount of the objective lens up to a focused state (a state in which the return beam agrees with the center of the two-piece sensor).
Public/Granted literature
- US20110279826A1 NONCONTACT SURFACE SHAPE MEASURING METHOD AND APPARATUS THEREOF Public/Granted day:2011-11-17
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