Invention Grant
US08570535B2 Pattern generators, calibration systems and methods for patterning workpieces
有权
图案发生器，校准系统和用于图案化工件的方法
- Patent Title: Pattern generators, calibration systems and methods for patterning workpieces
- Patent Title (中): 图案发生器，校准系统和用于图案化工件的方法
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Application No.: US13064067Application Date: 2011-03-03
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Publication No.: US08570535B2Publication Date: 2013-10-29
- Inventor: Anders Svensson , Fredrik Jonsson
- Applicant: Anders Svensson , Fredrik Jonsson
- Applicant Address: SE Taby
- Assignee: Micronic Mydata AB
- Current Assignee: Micronic Mydata AB
- Current Assignee Address: SE Taby
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
A pattern generator includes: a writing tool and a calibration system. The writing tool is configured to generate a pattern on a workpiece arranged on a stage. The calibration system is configured to determine a correlation between a coordinate system of the writing tool and a coordinate system of a calibration plate on one of the stage and the workpiece. The calibration system is also configured to determine the correlation at least partly based on an optical correlation signal, or pattern, in a form of at least one optical beam being reflected from at least one reflective pattern on the surface of the calibration plate.
Public/Granted literature
- US20110222074A1 Pattern generators, calibration systems and methods for patterning workpieces Public/Granted day:2011-09-15
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