Invention Grant
US08570632B2 Microactuator, optical device and exposure apparatus, and device manufacturing method
有权
微致动器，光学装置和曝光装置以及装置制造方法
- Patent Title: Microactuator, optical device and exposure apparatus, and device manufacturing method
- Patent Title (中): 微致动器，光学装置和曝光装置以及装置制造方法
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Application No.: US13085001Application Date: 2011-04-12
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Publication No.: US08570632B2Publication Date: 2013-10-29
- Inventor: Soichi Owa , Junji Suzuki
- Applicant: Soichi Owa , Junji Suzuki
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Staas & Halsey LLP
- Priority: JP2006-186449 20060706
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G02B26/08
Abstract:
A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.
Public/Granted literature
- US20110187810A1 MICROACTUATOR, OPTICAL DEVICE AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD Public/Granted day:2011-08-04
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