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US08571362B1 Forming optical device using multiple mask formation techniques 有权
使用多种掩模形成技术形成光学器件

Forming optical device using multiple mask formation techniques
Abstract:
An optical device includes a first region interfaced with a second region. The first region includes one or more surfaces that are formed using electron-beam lithography and the second region includes one or more surfaces that are formed using photolithography. A component crosses the interface and includes a first portion located in the first region and a second portion located in the second region. The component includes a light-signal carrying region that constrains light signals. The first portion includes a first taper that expands the light-signal carrying region as the component approaches the interface and the second portion includes a second taper that expands the light-signal carrying region as the component approaches the interface.
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