Invention Grant
- Patent Title: High-vacuum seal
- Patent Title (中): 高真空密封
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Application No.: US12876719Application Date: 2010-09-07
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Publication No.: US08573600B2Publication Date: 2013-11-05
- Inventor: Stephanus Hubertus Leonardus van den Boom , Roland Wilhelmus Pieter Jonkers , Henricus Fransiscus Maria van den Boom , Rients Jan de Groot , Pieter Hendrik Trudo Johannes Uland
- Applicant: Stephanus Hubertus Leonardus van den Boom , Roland Wilhelmus Pieter Jonkers , Henricus Fransiscus Maria van den Boom , Rients Jan de Groot , Pieter Hendrik Trudo Johannes Uland
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP09169562 20090907
- Main IPC: F16J15/40
- IPC: F16J15/40

Abstract:
The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-ring seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs.The invention proposes to place the O-ring in a channel in which dry gas, such as dry nitrogen, is blown. In this way no water can permeate through the O-ring, resulting in a reduced base pressure and highly reduced ice growth.
Public/Granted literature
- US20110057393A1 HIGH-VACUUM SEAL Public/Granted day:2011-03-10
Information query
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