Invention Grant
US08574814B2 Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the composition
有权
光化射线敏感或辐射敏感性树脂组合物,以及使用该组合物的光化射线敏感或辐射敏感膜和图案形成方法
- Patent Title: Actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film and pattern forming method using the composition
- Patent Title (中): 光化射线敏感或辐射敏感性树脂组合物,以及使用该组合物的光化射线敏感或辐射敏感膜和图案形成方法
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Application No.: US13528477Application Date: 2012-06-20
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Publication No.: US08574814B2Publication Date: 2013-11-05
- Inventor: Takeshi Inasaki , Tomotaka Tsuchimura
- Applicant: Takeshi Inasaki , Tomotaka Tsuchimura
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2011-144458 20110629
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/028 ; G03F7/26 ; G03F7/20

Abstract:
An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition that can form independent line patterns with high resolution and excellent shapes and shows excellent resist performances including roughness characteristics, and to provide an actinic ray-sensitive or radiation-sensitive film and a pattern forming method using the composition.The actinic ray-sensitive or radiation-sensitive resin composition contains a compound (P) that contains at least one phenolic hydroxyl group and at least one group in which a hydrogen atom of a phenolic hydroxyl group is substituted with a group represented by the following General Formula (1) (the respective symbols in the formula represent the same definitions as in the claims and the specification).
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