Magnetic tunnel junction device and its fabricating method

Invention Grant

US08574927B2 Magnetic tunnel junction device and its fabricating method 有权

Title translation: 磁隧道结装置及其制造方法

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Patent Title: Magnetic tunnel junction device and its fabricating method
Patent Title (中): 磁隧道结装置及其制造方法
Application No.: US13335882

Application Date: 2011-12-22
Publication No.: US08574927B2

Publication Date: 2013-11-05
Inventor: Min-Hwa Chi , Xiufeng Han , Guoqiang Yu
Applicant: Min-Hwa Chi , Xiufeng Han , Guoqiang Yu
Applicant Address: CN Beijing
Assignee: Semiconductor Manufacturing International (Beijing) Corporation
Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation
Current Assignee Address: CN Beijing
Agency: Innovation Counsel LLP
Priority: CN201110318281 20111019
Main IPC: H01L21/8246
IPC: H01L21/8246

Magnetic tunnel junction device and its fabricating method

Abstract:

Using a damascene process, a cup-shaped MTJ device is formed in an opening within a dielectric layer. A passivation layer is formed on the top surfaces of the sidewalls of the cup-shaped MTJ device to enclose the top of the sidewalls, thereby reducing magnetic flux leakage. Accordingly, the MTJ device may be fabricated using the same equipment that are compatible with and commonly used in CMOS technologies/processes.

Abstract(Chinese):

使用镶嵌工艺，在电介质层内的开口中形成杯形MTJ器件。在杯形MTJ装置的侧壁的顶表面上形成钝化层以封闭侧壁的顶部，由此减小磁通量泄漏。因此，可以使用与CMOS技术/工艺中兼容并且通常使用的相同设备来制造MTJ器件。

Public/Granted literature

US20130099335A1 Novel Magnetic Tunnel Junction Device And Its Fabricating Method Public/Granted day:2013-04-25

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/82	....制造器件，例如每一个由许多元件组成的集成电路
H01L21/822	.....衬底是采用硅工艺的半导体的（H01L21/8258优先）
H01L21/8232	......场效应工艺
H01L21/8234	.......MIS工艺
H01L21/8239	........存储器结构
H01L21/8246	.........只读存储器结构（ROM）