Invention Grant
- Patent Title: Method for fabricating nonvolatile memory device
- Patent Title (中): 非易失性存储器件的制造方法
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Application No.: US13331983Application Date: 2011-12-20
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Publication No.: US08574986B2Publication Date: 2013-11-05
- Inventor: Young-Ho Yang
- Applicant: Young-Ho Yang
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0042546 20110504
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating a nonvolatile memory device includes forming a substrate structure having a tunnel dielectric layer and a floating-gate conductive layer formed over an active region defined by a first isolation layer forming a first inter-gate dielectric layer and a first control-gate conductive layer over the substrate structure, forming a trench by etching the first control-gate conductive layer, the first inter-gate dielectric layer, the floating-gate conductive layer, the tunnel dielectric layer, and the active region to a given depth, forming a second isolation layer to fill the trench; and forming a second control-gate conductive layer over the resultant structure having the second isolation layer formed therein.
Public/Granted literature
- US20120282755A1 METHOD FOR FABRICATING NONVOLATILE MEMORY DEVICE Public/Granted day:2012-11-08
Information query
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