Invention Grant
- Patent Title: Semiconductor device production method and semiconductor device
- Patent Title (中): 半导体装置的制造方法及半导体装置
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Application No.: US13096047Application Date: 2011-04-28
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Publication No.: US08575012B2Publication Date: 2013-11-05
- Inventor: Masaki Haneda
- Applicant: Masaki Haneda
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-175727 20100804
- Main IPC: H01L21/28
- IPC: H01L21/28

Abstract:
A semiconductor device production method includes: forming an insulating film on a semiconductor substrate, forming a concave portion in the insulating film, forming a gate insulating film at bottom of the concave portion, the bottom being on the semiconductor substrate; covering an inner wall surface of the concave portion and a top face of the insulating film with a first gate electrode film that is made of an electrically conductive material containing a first metal; covering the first gate electrode film with a covering film of a material having a second melting point higher than a first melting point of the electrically conductive material, leaving part of the side face of the concave portion uncovered; and performing heat treatment following the covering film formation to allow the first gate electrode film to reflow.
Public/Granted literature
- US20120032281A1 SEMICONDUCTOR DEVICE PRODUCTION METHOD AND SEMICONDUCTOR DEVICE Public/Granted day:2012-02-09
Information query
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