Invention Grant
- Patent Title: Replacement gate fabrication methods
- Patent Title (中): 替代门制造方法
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Application No.: US13281236Application Date: 2011-10-25
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Publication No.: US08575013B2Publication Date: 2013-11-05
- Inventor: Peter Baars , Matthias Goldbach
- Applicant: Peter Baars , Matthias Goldbach
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee: GLOBALFOUNDRIES, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
Semiconductor devices and related fabrication methods are provided. An exemplary fabrication method involves forming a pair of gate structures having a dielectric region disposed between a first gate structure of the pair and a second gate structure of the pair, and forming a voided region in the dielectric region between the first gate structure and the second gate structure. The first and second gate structures each include a first gate electrode material, wherein the method continues by removing the first gate electrode material to provide second and third voided regions corresponding to the gate structures and forming a second gate electrode material in the first voided region, the second voided region, and the third voided region.
Public/Granted literature
- US20130099295A1 REPLACEMENT GATE FABRICATION METHODS Public/Granted day:2013-04-25
Information query
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