Invention Grant
- Patent Title: Pattern-split decomposition strategy for double-patterned lithography process
- Patent Title (中): 双图案光刻工艺的图案分解分解策略
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Application No.: US13410188Application Date: 2012-03-01
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Publication No.: US08575020B2Publication Date: 2013-11-05
- Inventor: James Walter Blatchford
- Applicant: James Walter Blatchford
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/4763

Abstract:
An integrated circuit may be formed by a process of forming a first interconnect pattern in a plurality of parallel route tracks, and forming a second interconnect pattern in the plurality of parallel route tracks. The first interconnect pattern includes a first lead pattern which extends to a first point in an instance of the first plurality of parallel route tracks, and the second interconnect pattern includes a second lead pattern which extends to a second point in the same instance of the plurality of parallel route tracks, such that the second point is laterally separated from the first point by a distance one to one and one-half times a space between adjacent parallel lead patterns in the plurality of parallel route tracks. A metal interconnect formation process is performed which forms metal interconnect lines in an interconnect level defined by the first interconnect pattern and the second interconnect pattern.
Public/Granted literature
- US20120225551A1 PATTERN-SPLIT DECOMPOSITION STRATEGY FOR DOUBLE-PATTERNED LITHOGRAPHY PROCESS Public/Granted day:2012-09-06
Information query
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