Invention Grant
- Patent Title: Phase change memory cell with heater and method therefor
- Patent Title (中): 具有加热器的相变存储器单元及其方法
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Application No.: US13238791Application Date: 2011-09-21
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Publication No.: US08575588B2Publication Date: 2013-11-05
- Inventor: Leo Mathew , Dharmesh Jawarani , Tushar P. Merchant , Ramachandran Muralidhar
- Applicant: Leo Mathew , Dharmesh Jawarani , Tushar P. Merchant , Ramachandran Muralidhar
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent James L. Clingan, Jr.; David G. Dolezal
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A method for forming a phase change memory cell (PCM) includes forming a heater for the phase change memory and forming a phase change structrure electrically coupled to the heater. The forming a heater includes siliciding a material including silicon to form a silicide structure, wherein the heater includes at least a portion of the silicide structure. The phase change structure exhibits a first resistive value when in a first phase state and exhibits a second resistive value when in a second phase state. The silicide structure produces heat when current flows through the silicide structure for changing the phase state of the phase change structure.
Public/Granted literature
- US20120007031A1 PHASE CHANGE MEMORY CELL WITH HEATER AND METHOD THEREFOR Public/Granted day:2012-01-12
Information query
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