Invention Grant
- Patent Title: Thin film transistor and manufacturing method thereof
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US12973123Application Date: 2010-12-20
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Publication No.: US08575608B2Publication Date: 2013-11-05
- Inventor: Shinya Sasagawa , Akihiro Ishizuka , Shinobu Furukawa , Motomu Kurata
- Applicant: Shinya Sasagawa , Akihiro Ishizuka , Shinobu Furukawa , Motomu Kurata
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2009-289802 20091221
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
An embodiment is a thin film transistor which includes a gate electrode layer, a gate insulating layer provided so as to cover the gate electrode layer; a first semiconductor layer entirely overlapped with the gate electrode layer; a second semiconductor layer provided over and in contact with the first semiconductor layer and having a lower carrier mobility than the first semiconductor layer; an impurity semiconductor layer provided in contact with the second semiconductor layer; a sidewall insulating layer provided so as to cover at least a sidewall of the first semiconductor layer; and a source and drain electrode layers provided in contact with at least the impurity semiconductor layer. The second semiconductor layer may consist of parts which are apart from each other over the first semiconductor layer.
Public/Granted literature
- US20110147745A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-06-23
Information query
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