Invention Grant
- Patent Title: Bi-section semiconductor laser device, method for manufacturing the same, and method for driving the same
- Patent Title (中): 双段半导体激光装置及其制造方法及其驱动方法
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Application No.: US13553380Application Date: 2012-07-19
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Publication No.: US08575626B2Publication Date: 2013-11-05
- Inventor: Hideki Watanabe , Takao Miyajima , Masao Ikeda , Hiroyuki Yokoyama , Tomoyuki Oki , Masaru Kuramoto
- Applicant: Hideki Watanabe , Takao Miyajima , Masao Ikeda , Hiroyuki Yokoyama , Tomoyuki Oki , Masaru Kuramoto
- Applicant Address: JP Tokyo JP Miyagi
- Assignee: Sony Corporation,Tohoku University
- Current Assignee: Sony Corporation,Tohoku University
- Current Assignee Address: JP Tokyo JP Miyagi
- Agency: Dentons US LLP
- Priority: JP2009-077070 20090326; JP2010-031299 20100216
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01L21/00

Abstract:
A method for manufacturing a bi-section semiconductor laser device includes the steps of (A) forming a stacked structure obtained by stacking, on a substrate in sequence, a first compound semiconductor layer of a first conductivity type, a compound semiconductor layer that constitutes a light-emitting region and a saturable absorption region, and a second compound semiconductor layer of a second conductivity type; (B) forming a belt-shaped second electrode on the second compound semiconductor layer; (C) forming a ridge structure by etching at least part of the second compound semiconductor layer using the second electrode as an etching mask; and (D) forming a resist layer for forming a separating groove in the second electrode and then forming the separating groove in the second electrode by wet etching so that the separating groove separates the second electrode into a first portion and a second portion.
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