Invention Grant
- Patent Title: Avalanche photodiode
- Patent Title (中): 雪崩光电二极管
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Application No.: US13133990Application Date: 2009-12-11
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Publication No.: US08575650B2Publication Date: 2013-11-05
- Inventor: Tadao Ishibashi , Seigo Ando , Yoshifumi Muramoto , Fumito Nakajima , Haruki Yokoyama
- Applicant: Tadao Ishibashi , Seigo Ando , Yoshifumi Muramoto , Fumito Nakajima , Haruki Yokoyama
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: NTT Electronics Corporation,Nippon Telegraph and Telephone Corporation
- Current Assignee: NTT Electronics Corporation,Nippon Telegraph and Telephone Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Ohlandt Greeley Ruggiero & Perle L.L.P.
- Priority: JP2008-321298 20081217
- International Application: PCT/JP2009/070783 WO 20091211
- International Announcement: WO2010/071088 WO 20100624
- Main IPC: H01L31/107
- IPC: H01L31/107

Abstract:
An electron injected APD with an embedded n electrode structure in which edge breakdown can be suppressed without controlling the doping profile of an n-type region of the embedded n electrode structure with high precision. The APD comprising a buffer layer with a low ionization rate is inserted between an n electrode connecting layer and an avalanche multiplication layer. Specifically, the APD is an electron injected APD in which an n electrode layer, the n electrode connecting layer, the buffer layer, the avalanche multiplication layer, an electric field control layer, a band gap gradient layer, a low-concentration light absorbing layer, a p-type light absorbing layer, and a p electrode layer are sequentially stacked, and a light absorbing portion that includes at least the low-concentration light absorbing layer and the p-type light absorbing layer forms a mesa shape.
Public/Granted literature
- US20110241150A1 AVALANCHE PHOTODIODE Public/Granted day:2011-10-06
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