Invention Grant
US08575669B2 Fabricating technique of a highly integrated semiconductor device in which a capacitor is formed between adjacent gate patterns by using a nanotube process 失效
通过使用纳米管工艺在相邻的栅极图案之间形成电容器的高度集成的半导体器件的制造技术

  • Patent Title: Fabricating technique of a highly integrated semiconductor device in which a capacitor is formed between adjacent gate patterns by using a nanotube process
  • Patent Title (中): 通过使用纳米管工艺在相邻的栅极图案之间形成电容器的高度集成的半导体器件的制造技术
  • Application No.: US12650335
    Application Date: 2009-12-30
  • Publication No.: US08575669B2
    Publication Date: 2013-11-05
  • Inventor: Chi Hwan Jang
  • Applicant: Chi Hwan Jang
  • Applicant Address: KR Icheon
  • Assignee: Hynix Semiconductor Inc
  • Current Assignee: Hynix Semiconductor Inc
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2009-0060572 20090703
  • Main IPC: H01L27/08
  • IPC: H01L27/08 H01L29/94 H01L21/8242
Fabricating technique of a highly integrated semiconductor device in which a capacitor is formed between adjacent gate patterns by using a nanotube process
Abstract:
The present invention relates to a highly integrated semiconductor device in which a capacitor is formed between adjacent gate patterns by using a nanotube process. A semiconductor memory device according to an example embodiment of the present invention includes a capacitor formed on a first side of a source/drain region positioned between gate patterns of adjacent cell transistors; a plate layer connected to an upper portion of the capacitor, the plate layer being formed in a direction intersecting the gate pattern; and a bit line connected to a second side of the source/drain region of the cell transistor, the bit line being formed in the direction intersecting the gate pattern.
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