Invention Grant
- Patent Title: Nonvolatile semiconductor memory devices
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Application No.: US13047403Application Date: 2011-03-14
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Publication No.: US08575672B2Publication Date: 2013-11-05
- Inventor: Ki-whan Song , Byung-Gook Park
- Applicant: Ki-whan Song , Byung-Gook Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2005-0086443 20050915
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
A nonvolatile semiconductor memory device includes a plurality of pillars protruding upward from a semiconductor substrate and having respective top surfaces and opposing sidewalls, a bit line on the top surfaces of the pillars and connecting a row of the pillars along a first direction, a pair of word lines on the opposing sidewalls of one of the plurality of pillars and crossing beneath the bit line, and a pair of memory layers interposed between respective ones of the pair of word lines and the one of the plurality of pillars. Methods of fabricating a nonvolatile semiconductor memory device include selectively etching a semiconductor substrate to form pluralities of stripes having opposing sidewalls and being arranged along a direction, forming memory layers and word lines along the sidewalls of the stripes selectively etching the stripes to form a plurality of pillars, and forming a bit line connecting the pillars and crossing above the word lines.
Public/Granted literature
- US20110163371A1 METHODS OF FABRICATING NONVOLATILE SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2011-07-07
Information query
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