Invention Grant
- Patent Title: Nonvolatile memory device
- Patent Title (中): 非易失性存储器件
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Application No.: US13333693Application Date: 2011-12-21
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Publication No.: US08575675B2Publication Date: 2013-11-05
- Inventor: Sun-Mi Park , Byung-Soo Park , Sang-Hyun Oh
- Applicant: Sun-Mi Park , Byung-Soo Park , Sang-Hyun Oh
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2011-0042595 20110504
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
A nonvolatile memory device includes a first channel comprising a pair of first pillars vertically extending from a substrate and a first coupling portion positioned under the pair of first pillars and coupling the pair of first pillars, a second channel adjacent to the first channel comprising a pair of second pillars vertically extending from the substrate and a second coupling portion positioned under the pair of second pillars and coupling the pair of second pillars, a plurality of gate electrode layers and interlayer dielectric layers alternately stacked along the first and second pillar portions, and first and second trenches isolating the plurality of gate electrode layers between the pair of first pillar portions and between the pair of second pillar portions, respectively.
Public/Granted literature
- US20120280298A1 NONVOLATILE MEMORY DEVICE Public/Granted day:2012-11-08
Information query
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