Invention Grant
US08575687B2 Semiconductor switch device 有权
半导体开关器件

  • Patent Title: Semiconductor switch device
  • Patent Title (中): 半导体开关器件
  • Application No.: US12601923
    Application Date: 2008-05-30
  • Publication No.: US08575687B2
    Publication Date: 2013-11-05
  • Inventor: Masaru Takaishi
  • Applicant: Masaru Takaishi
  • Applicant Address: JP Kyoto
  • Assignee: Rohm Co., Ltd.
  • Current Assignee: Rohm Co., Ltd.
  • Current Assignee Address: JP Kyoto
  • Agency: Fish & Richardson P.C.
  • Priority: JP2007-143214 20070530; JP2007-143221 20070530
  • International Application: PCT/JP2008/060007 WO 20080530
  • International Announcement: WO2008/149800 WO 20081211
  • Main IPC: H01L29/66
  • IPC: H01L29/66
Semiconductor switch device
Abstract:
Provided is a semiconductor device in which on-resistance is largely reduced. The semiconductor device includes an n type epitaxial layer in which each region between neighboring trenches becomes a channel, and a plurality of embedded electrodes each of which is formed on an inner surface of each trench via a silicon oxide film. The plurality of embedded electrodes include two types of embedded electrodes to which voltages are applied separately. By blocking each region between neighboring trenches with a depletion layer formed around every trench, current flowing through each region between the neighboring trenches is interrupted. By deleting the depletion layer formed around the trench filled with the embedded electrode, current can flow through each region between neighboring trenches.
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