Invention Grant
- Patent Title: Semiconductor device, manufacturing method thereof, and display device
-
Application No.: US11790741Application Date: 2007-04-27
-
Publication No.: US08575696B2Publication Date: 2013-11-05
- Inventor: Hiroshi Shibata , Shinji Maekawa
- Applicant: Hiroshi Shibata , Shinji Maekawa
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2001-166877 20010601; JP2001-230701 20010731; JP2001-367575 20011130
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A multi-gate structure is used and a width (d1) of a high concentration impurity region sandwiched by two channel forming regions in a channel length direction is set to be shorter than a width (d2) of low concentration impurity regions in the channel length direction. Thus, a resistance of the entire semiconductor layer of a TFT which is in an on state is reduced to increase an on current. In addition, a carrier life time due to photoexcitation produced in the high concentration impurity region can be shortened to reduce light sensitivity.
Public/Granted literature
- US20070200139A1 Semiconductor device, manufacturing method thereof, and display device Public/Granted day:2007-08-30
Information query
IPC分类: