Invention Grant
US08575700B2 Charge-balance power device comprising columnar structures and having reduced resistance
有权
电荷平衡功率器件包括柱状结构并具有降低的电阻
- Patent Title: Charge-balance power device comprising columnar structures and having reduced resistance
- Patent Title (中): 电荷平衡功率器件包括柱状结构并具有降低的电阻
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Application No.: US12134050Application Date: 2008-06-05
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Publication No.: US08575700B2Publication Date: 2013-11-05
- Inventor: Fabio Zara
- Applicant: Fabio Zara
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Graybeal Jackson LLP
- Priority: ITTO2007A0392 20070605
- Main IPC: H01L23/62
- IPC: H01L23/62

Abstract:
A charge-balance power device formed in an epitaxial layer having a first conductivity type and housing at least two columnar structures of a second conductivity type, which extend through the epitaxial layer. A first surface region of the second conductivity type extends along the surface of the epitaxial layer on top of, and in contact with, the columns, and a second surface region of the first conductivity type extends within the first surface region, and also faces the surface of the epitaxial layer. The columns extend at a distance from one another from the first surface region so as to delimit between them an epitaxial portion that defines a current path so as to reduce the on-resistivity of the device.
Public/Granted literature
- US20080303082A1 CHARGE-BALANCE POWER DEVICE COMPRISING COLUMNAR STRUCTURES AND HAVING REDUCED RESISTANCE Public/Granted day:2008-12-11
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