Invention Grant
US08575700B2 Charge-balance power device comprising columnar structures and having reduced resistance 有权
电荷平衡功率器件包括柱状结构并具有降低的电阻

  • Patent Title: Charge-balance power device comprising columnar structures and having reduced resistance
  • Patent Title (中): 电荷平衡功率器件包括柱状结构并具有降低的电阻
  • Application No.: US12134050
    Application Date: 2008-06-05
  • Publication No.: US08575700B2
    Publication Date: 2013-11-05
  • Inventor: Fabio Zara
  • Applicant: Fabio Zara
  • Applicant Address: IT Agrate Brianza
  • Assignee: STMicroelectronics S.r.l.
  • Current Assignee: STMicroelectronics S.r.l.
  • Current Assignee Address: IT Agrate Brianza
  • Agency: Graybeal Jackson LLP
  • Priority: ITTO2007A0392 20070605
  • Main IPC: H01L23/62
  • IPC: H01L23/62
Charge-balance power device comprising columnar structures and having reduced resistance
Abstract:
A charge-balance power device formed in an epitaxial layer having a first conductivity type and housing at least two columnar structures of a second conductivity type, which extend through the epitaxial layer. A first surface region of the second conductivity type extends along the surface of the epitaxial layer on top of, and in contact with, the columns, and a second surface region of the first conductivity type extends within the first surface region, and also faces the surface of the epitaxial layer. The columns extend at a distance from one another from the first surface region so as to delimit between them an epitaxial portion that defines a current path so as to reduce the on-resistivity of the device.
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