Invention Grant
- Patent Title: Semiconductor device and electronic apparatus including the same
- Patent Title (中): 半导体装置及其电子装置
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Application No.: US13285132Application Date: 2011-10-31
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Publication No.: US08575759B2Publication Date: 2013-11-05
- Inventor: Takahiro Nakano
- Applicant: Takahiro Nakano
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Panasonic Patent Center
- Priority: JP2009-118075 20090514
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device according to the present invention is a semiconductor device that includes: a semiconductor substrate having metal wiring formed on a bottom surface of the semiconductor substrate; and a plurality of wiring layers formed above the semiconductor substrate. The wiring layers include a first wiring layer and a second wiring layer that is formed above the first wiring layer. The semiconductor device further includes: a first through electrode which electrically connects the first wiring layer and the metal wiring; a second through electrode which electrically connects the second wiring layer and the metal wiring; and at least one layer difference adjustment film formed between the semiconductor substrate and the wiring layers. The at least one layer difference adjustment film includes a layer difference adjustment film formed on a region excluding a region corresponding to the second through electrode.
Public/Granted literature
- US20120043665A1 SEMICONDUCTOR DEVICE AND ELECTRONIC APPARATUS INCLUDING THE SAME Public/Granted day:2012-02-23
Information query
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