Invention Grant
- Patent Title: Lithographic apparatus and device manufacturing method
- Patent Title (中): 平版印刷设备和器件制造方法
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Application No.: US12000092Application Date: 2007-12-07
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Publication No.: US08576377B2Publication Date: 2013-11-05
- Inventor: Steven George Hansen , Heine Melle Mulder , Robert Kazinczi
- Applicant: Steven George Hansen , Heine Melle Mulder , Robert Kazinczi
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/68 ; G03B27/32 ; G03B27/42 ; G03B27/52

Abstract:
A method for configuring an illumination source of a lithographic apparatus is presented. The method includes dividing the illumination source into pixel groups, each pixel group including one or more illumination source points; selecting an illumination shape to expose a pattern, the illumination shape formed with at least one pixel group; iteratively calculating a lithographic metric as a result of a change of state of a pixel group in the illumination source, the change of the state of the pixel group creating a modified illumination shape; and adjusting the illumination shape based on the iterative results of calculations.
Public/Granted literature
- US20080186468A1 Lithographic apparatus and device manufacturing method Public/Granted day:2008-08-07
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