Invention Grant
- Patent Title: Optical interferometer
- Patent Title (中): 光学干涉仪
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Application No.: US13209497Application Date: 2011-08-15
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Publication No.: US08576404B2Publication Date: 2013-11-05
- Inventor: Yoshiyuki Kuramoto , Takamasa Sasaki
- Applicant: Yoshiyuki Kuramoto , Takamasa Sasaki
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-183603 20100819
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
An optical interferometer including, an analyzer configured to calculate an air dispersion ratio of air in the dispersion measurement interferometer excluding the component gas on the basis of a detection result of a first partial pressure detector, to calculate dispersion of air in a distance measurement interferometer from the calculated air dispersion ratio and a detection result of a second partial pressure detector, and to calculate a geometrical distance of the optical path length difference between a reference surface and a target surface.
Public/Granted literature
- US20120044500A1 OPTICAL INTERFEROMETER Public/Granted day:2012-02-23
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