Invention Grant
US08576404B2 Optical interferometer 有权
光学干涉仪

Optical interferometer
Abstract:
An optical interferometer including, an analyzer configured to calculate an air dispersion ratio of air in the dispersion measurement interferometer excluding the component gas on the basis of a detection result of a first partial pressure detector, to calculate dispersion of air in a distance measurement interferometer from the calculated air dispersion ratio and a detection result of a second partial pressure detector, and to calculate a geometrical distance of the optical path length difference between a reference surface and a target surface.
Public/Granted literature
Information query
Patent Agency Ranking
0/0