Invention Grant
US08576408B2 Surface figure test method for large convex optical surfaces 失效
大凸面光学表面的表面图形测试方法

  • Patent Title: Surface figure test method for large convex optical surfaces
  • Patent Title (中): 大凸面光学表面的表面图形测试方法
  • Application No.: US13084365
    Application Date: 2011-04-11
  • Publication No.: US08576408B2
    Publication Date: 2013-11-05
  • Inventor: Thomas Stewart McKechnie
  • Applicant: Thomas Stewart McKechnie
  • Agent Kenneth E. Callahan
  • Main IPC: G01B11/02
  • IPC: G01B11/02
Surface figure test method for large convex optical surfaces
Abstract:
A method of testing figure quality of a convex mirror in which an optical quality substrate material is used. Three separate interferometric null tests are carried out to produce three independent sets of optical path difference (OPD) data. Null lenses, or nulling computer generated holograms (CGHs), are designed and used as needed in each test setup so that spherical aberration is corrected. From the three sets of OPD data, surface figure errors on the rear and front surfaces of the test optic are calculated as well as the OPD error introduced by refractive index inhomogeneity in the substrate material. The rear surface is then corrected, generally using a computer-controlled polishing machine, to reduce rear surface errors to a manageably small level. The front convex surface of the test optic is then corrected to reduce surface figure error to within some specified amount.
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