Invention Grant
US08576411B2 Component position measurement method 有权
元件位置测量方法

Component position measurement method
Abstract:
In the component position measurement method, the position B of the component 1 when the laser beam is blocked (the laser beam blocking position) is measured with respect to the chuck position A of the component 1. Since the component 1 generates a large vibration (inclination) during the chuck is used, the position of the leading end (front end) C of the component 1 is computed using the inclination angle θ with respect to the measurement value of the deviation amount H of the laser beam blocking position B of the component 1 based on a similarity relationship of a triangle.
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