Invention Grant
- Patent Title: MEMS switch
- Patent Title (中): MEMS开关
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Application No.: US13209769Application Date: 2011-08-15
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Publication No.: US08576475B2Publication Date: 2013-11-05
- Inventor: Sung-Hui Huang , Po-Wen Hsiao
- Applicant: Sung-Hui Huang , Po-Wen Hsiao
- Applicant Address: TW Hsinchu County
- Assignee: E Ink Holdings Inc.
- Current Assignee: E Ink Holdings Inc.
- Current Assignee Address: TW Hsinchu County
- Agent Chun-Ming Shih
- Main IPC: G02B26/00
- IPC: G02B26/00

Abstract:
A micro electro-mechanical system (MEMS) switch includes an active device, an immovable metal layer and a movable metal layer is provided. The immovable metal layer is disposed on the active device and the movable metal layer is disposed above the immovable metal layer. Accordingly, an insulating cavity is formed between the immovable metal layer and the movable metal layer. Further, the active device is capable of driving the movable metal layer. Compare to thin film transistor, since the operation performance of the MEMS switches would not affected by carrier mobility and on-off current ratio, display performance of the display device can be easily improved.
Public/Granted literature
- US20110297519A1 MEMS SWITCH Public/Granted day:2011-12-08
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