Invention Grant
US08576891B2 Gas laser oscillator and gas exchange method for gas laser oscillator
有权
气体激光振荡器和气体激光振荡器的气体交换方法
- Patent Title: Gas laser oscillator and gas exchange method for gas laser oscillator
- Patent Title (中): 气体激光振荡器和气体激光振荡器的气体交换方法
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Application No.: US13878911Application Date: 2011-09-13
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Publication No.: US08576891B2Publication Date: 2013-11-05
- Inventor: Naoki Miyamoto , Mototoshi Kumaoka
- Applicant: Naoki Miyamoto , Mototoshi Kumaoka
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2010-234968 20101019
- International Application: PCT/JP2011/070899 WO 20110913
- International Announcement: WO2012/053298 WO 20120426
- Main IPC: H01S3/20
- IPC: H01S3/20

Abstract:
The sealed gas laser oscillator that includes the airtight vessel, the laser gas supply source that supplies a laser gas to the airtight vessel, and the vacuum pump that performs evacuation until a pressure of an inside of the airtight vessel reaches a target reached pressure every predetermined interval between laser gas exchanges and is connected to the airtight vessel, and that performs laser oscillation in a state where the airtight vessel is filled with the laser gas. The gas laser oscillator includes a unit that determines the target reached pressure on the basis of the interval between laser gas exchanges, a leakage rate of an impurity gas from the outside to the airtight vessel after evacuation, and an allowable impurity gas pressure at which the gas laser oscillator is capable of being operated.
Public/Granted literature
- US20130186476A1 GAS LASER OSCILLATOR AND GAS EXCHANGE METHOD FOR GAS LASER OSCILLATOR Public/Granted day:2013-07-25
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