Invention Grant
- Patent Title: Packages and methods for packaging MEMS microphone devices
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Application No.: US13027737Application Date: 2011-02-15
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Publication No.: US08577063B2Publication Date: 2013-11-05
- Inventor: Jicheng Yang
- Applicant: Jicheng Yang
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R9/08

Abstract:
Microelectromechanical systems (MEMS) microphone devices and methods for packaging the same include a package housing, an interior lid, and an integrated MEMS microphone die. The package housing includes a sound port therethrough for communicating sound from outside the package housing to an interior of the package housing. The interior lid is mounted to an interior surface of the package housing to define an interior lid cavity, and includes a back volume port therethrough. The MEMS microphone die is mounted on the interior lid over the back volume port, and includes a movable membrane. The back volume port is configured to allow the interior lid cavity and the MEMS movable membrane to communicate, thereby increasing the back volume of the MEMS microphone die and enhancing the sound performance of the packaged MEMS microphone device.
Public/Granted literature
- US20110198714A1 PACKAGES AND METHODS FOR PACKAGING MEMS MICROPHONE DEVICES Public/Granted day:2011-08-18
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