Invention Grant
- Patent Title: Methods and apparatus for automated predictive design space estimation
- Patent Title (中): 自动预测设计空间估计的方法和装置
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Application No.: US13775708Application Date: 2013-02-25
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Publication No.: US08577480B2Publication Date: 2013-11-05
- Inventor: Ernst Conny Vikström , Rafael Johannes Björk , Patrik Rydén
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: G05B13/02
- IPC: G05B13/02 ; G06F7/60

Abstract:
Described are computer-implemented methods and apparatuses, including computer program products, for estimating an optimal value for each input factor of a design space. The design space is defined by the input factors and output responses for a physical process. The optimal values for the input factors represent a starting point for estimating the design space. Data is received for the input factors, the output responses and criteria. An initial design space is estimated based on the received data. The optimal values for the input factors are determined from the initial design space.
Public/Granted literature
- US20130218529A1 METHODS AND APPARATUS FOR AUTOMATED PREDICTIVE DESIGN SPACE ESTIMATION Public/Granted day:2013-08-22
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