Invention Grant
US08578305B2 Semiconductor devices having tensile and/or compressive strain and methods of manufacturing and design structure 有权
具有拉伸和/或压缩应变的半导体器件以及制造和设计结构的方法

Semiconductor devices having tensile and/or compressive strain and methods of manufacturing and design structure
Abstract:
A semiconductor device having a tensile and/or compressive strain applied thereto and methods of manufacturing the semiconductor devices and design structure to enhance channel strain. The method includes forming a gate structure for an NFET and a PFET and forming sidewalls on the gate structure for the NFET and the PFET using a same deposition and etching process. The method also includes providing stress materials in the source and drain regions of the NFET and the PFET.
Information query
Patent Agency Ranking
0/0