Invention Grant
US08578305B2 Semiconductor devices having tensile and/or compressive strain and methods of manufacturing and design structure
有权
具有拉伸和/或压缩应变的半导体器件以及制造和设计结构的方法
- Patent Title: Semiconductor devices having tensile and/or compressive strain and methods of manufacturing and design structure
- Patent Title (中): 具有拉伸和/或压缩应变的半导体器件以及制造和设计结构的方法
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Application No.: US12984927Application Date: 2011-01-05
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Publication No.: US08578305B2Publication Date: 2013-11-05
- Inventor: Kangguo Cheng , Carl J. Radens
- Applicant: Kangguo Cheng , Carl J. Radens
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Matthew C. Zehrer
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A semiconductor device having a tensile and/or compressive strain applied thereto and methods of manufacturing the semiconductor devices and design structure to enhance channel strain. The method includes forming a gate structure for an NFET and a PFET and forming sidewalls on the gate structure for the NFET and the PFET using a same deposition and etching process. The method also includes providing stress materials in the source and drain regions of the NFET and the PFET.
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