Invention Grant
US08581272B2 Method of producing nanopatterned articles, and articles produced thereby
有权
制造纳米图案制品的方法和由此制造的制品
- Patent Title: Method of producing nanopatterned articles, and articles produced thereby
- Patent Title (中): 制造纳米图案制品的方法和由此制造的制品
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Application No.: US13461175Application Date: 2012-05-01
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Publication No.: US08581272B2Publication Date: 2013-11-12
- Inventor: Thomas P. Russell , Soojin Park , Ting Xu
- Applicant: Thomas P. Russell , Soojin Park , Ting Xu
- Applicant Address: US MA Boston US CA Oakland
- Assignee: The University of Massachusetts,The Regents of the University of California
- Current Assignee: The University of Massachusetts,The Regents of the University of California
- Current Assignee Address: US MA Boston US CA Oakland
- Agency: Cantor Colburn LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A nanopatterned surface is prepared by forming a block copolymer film on a miscut crystalline substrate, annealing the block copolymer film, then reconstructing the surface of the annealed block copolymer film. The method creates a well-ordered array of voids in the block copolymer film that is maintained over a large area. The nanopatterned block copolymer films can be used in a variety of different applications, including the fabrication of high density data storage media.
Public/Granted literature
- US20120211871A1 METHOD OF PRODUCING NANOPATTERNED ARTICLES, AND ARTICLES PRODUCED THEREBY Public/Granted day:2012-08-23
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