Invention Grant
US08582314B2 Interconnection structure, interposer, semiconductor package, and method of manufacturing interconnection structure 有权
互连结构,插入器,半导体封装以及制造互连结构的方法

Interconnection structure, interposer, semiconductor package, and method of manufacturing interconnection structure
Abstract:
There is provided an interconnection structure. An interconnection structure according to an aspect of the invention may include: a plurality of side portions provided on one surface of a substrate part and a plurality of cavities located between the side portions and located further inward than the side portions; and electrode pattern portions provided on surfaces of the side portions and the cavities.
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