Invention Grant
- Patent Title: Cell layout for multiple patterning technology
- Patent Title (中): 多种图案化技术的单元布局
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Application No.: US13084255Application Date: 2011-04-11
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Publication No.: US08584052B2Publication Date: 2013-11-12
- Inventor: Huang-Yu Chen , Yuan-Te Hou , Ken-Hsien Hsieh , Ru-Gun Liu , Lee-Chung Lu
- Applicant: Huang-Yu Chen , Yuan-Te Hou , Ken-Hsien Hsieh , Ru-Gun Liu , Lee-Chung Lu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A system and method for providing a cell layout for multiple patterning technology is provided. An area to be patterned is divided into alternating sites corresponding to the various masks. During a layout process, sites located along a boundary of a cell are limited to having patterns in the mask associated with the boundary site. When placed, the individual cells are arranged such that the adjoining cells alternate the sites allocated to the various masks. In this manner, the designer knows when designing each individual cell that the mask pattern for one cell will be too close to the mask pattern for an adjoining cell.
Public/Granted literature
- US20120167021A1 Cell Layout for Multiple Patterning Technology Public/Granted day:2012-06-28
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