Invention Grant
US08587390B2 MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
有权
MEMS振子，振荡器和MEMS振子的制造方法
- Patent Title: MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
- Patent Title (中): MEMS振子，振荡器和MEMS振子的制造方法
-
Application No.: US13307336Application Date: 2011-11-30
-
Publication No.: US08587390B2Publication Date: 2013-11-19
- Inventor: Ryuji Kihara
- Applicant: Ryuji Kihara
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-276923 20101213
- Main IPC: H03H9/24
- IPC: H03H9/24 ; H01L21/00
Abstract:
A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.
Public/Granted literature
- US20120146736A1 MEMS VIBRATOR, OSCILLATOR, AND METHOD FOR MANUFACTURING MEMS VIBRATOR Public/Granted day:2012-06-14
Information query
