Invention Grant
- Patent Title: Cylinder surface treated container for monochlorosilane
- Patent Title (中): 用于单氯硅烷的圆筒表面处理容器
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Application No.: US13090346Application Date: 2011-04-20
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Publication No.: US08590705B2Publication Date: 2013-11-26
- Inventor: Philip E. Behm , Wayne Thomas McDermott , Manchao Xiao , Ronald Martin Pearlstein , Sai-Hong A. Lo , Agnes Derecskei-Kovacs
- Applicant: Philip E. Behm , Wayne Thomas McDermott , Manchao Xiao , Ronald Martin Pearlstein , Sai-Hong A. Lo , Agnes Derecskei-Kovacs
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Osaknian; Joseph D. Rossi
- Main IPC: B65D81/02
- IPC: B65D81/02 ; B24B1/00
Abstract:
The present invention is a container and a processing for passivating the internal surface of the container to store monochlorosilane in a stable manner without degradation of the monochlorosilane. Various container surface modifications have been identified to reduce surface reactions to acceptable levels. Some of the described surface modifications result in significant reduction in monochlorosilane instability.
Public/Granted literature
- US20120103857A1 Cylinder Surface Treatment For Monochlorosilane Public/Granted day:2012-05-03
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