Invention Grant
US08591009B2 Piezoelectric film, ink jet head, angular velocity sensor and piezoelectric generating element 有权
压电膜,喷墨头,角速度传感器和压电发生元件

Piezoelectric film, ink jet head, angular velocity sensor and piezoelectric generating element
Abstract:
The purpose of the present invention is to provide a BNT-BT piezoelectric film having a higher crystalline orientation, a higher piezoelectric constant, and a higher ferroelectric property. The present invention is directed to a piezoelectric film comprising a first electrode having only a (110) orientation; a (NaxBi0.5)TiO0.5x+2.75—BaTiO layer having only a (110) orientation, a (Bi,Na)TiO3—BaTiO3 layer having only a (110) orientation, and a second electrode, wherein a value of x is not less than 0.29 and not more than 0.40, and the first electrode, the (NaxBi0.5)TiO0.5x+2.75—BaTiO3 layer, the (Bi,Na)TiO3—BaTiO3 layer, and the second electrode are laminated in this order.
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