Invention Grant
US08591809B2 Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same 有权
基板转移容器,气体净化监测工具和半导体制造设备相同

Substrate transfer container, gas purge monitoring tool, and semiconductor manufacturing equipment with the same
Abstract:
A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.
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