Invention Grant
- Patent Title: Method of fabricating a wafer level semiconductor package having a pre-formed dielectric layer
- Patent Title (中): 制造具有预成形介电层的晶片级半导体封装的方法
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Application No.: US13306787Application Date: 2011-11-29
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Publication No.: US08592259B2Publication Date: 2013-11-26
- Inventor: Kevin (Kunzhong) Hu , Chonghua Zhong , Edward Law
- Applicant: Kevin (Kunzhong) Hu , Chonghua Zhong , Edward Law
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Agency: Farjami & Farjami LLP
- Main IPC: H01L21/50
- IPC: H01L21/50

Abstract:
There are disclosed herein various implementations of improved wafer level semiconductor packages. One exemplary implementation comprises forming a post-fabrication redistribution layer (post-Fab RDL) between first and second dielectric layers affixed over a surface of a wafer, and forming a window for receiving an electrical contact body in the second dielectric layer, the window exposing the post-Fab RDL. At least one of the first and second dielectric layers is a pre-formed dielectric layer, which may be affixed over the surface of the wafer using a lamination process. In one implementation, the window is formed using a direct laser ablation process.
Public/Granted literature
- US20130134596A1 Wafer Level Semiconductor Package Public/Granted day:2013-05-30
Information query
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