Invention Grant
- Patent Title: Gate-last fabrication of quarter-gap MGHK FET
- Patent Title (中): 最后制造四分之一MGHK FET
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Application No.: US12816605Application Date: 2010-06-16
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Publication No.: US08592296B2Publication Date: 2013-11-26
- Inventor: Takashi Ando , Kisik Choi , Vijay Narayanan , Tenko Yamashita , Junli Wang
- Applicant: Takashi Ando , Kisik Choi , Vijay Narayanan , Tenko Yamashita , Junli Wang
- Applicant Address: US NY Armonk KY
- Assignee: International Business Machines Corporation,GlobalFoundries Inc.
- Current Assignee: International Business Machines Corporation,GlobalFoundries Inc.
- Current Assignee Address: US NY Armonk KY
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
A quarter-gap p-type field effect transistor (PFET) formed by gate-last fabrication includes a gate stack formed on a silicon substrate, the gate stack including: a high-k dielectric layer located on the silicon substrate; and a gate metal layer located over the high-k dielectric layer, the gate metal layer including titanium nitride and having a thickness of about 20 angstroms; and a metal contact formed over the gate stack. A quarter-gap n-type field effect transistor (NFET) formed by gate-last fabrication includes a gate stack formed on a silicon substrate, the gate stack including: a high-k dielectric layer located on the silicon substrate; and a first gate metal layer located over the high-k dielectric layer, the first gate metal layer including titanium nitride; and a metal contact formed over the gate stack.
Public/Granted literature
- US20110309455A1 Gate-Last Fabrication of Quarter-Gap MGHK FET Public/Granted day:2011-12-22
Information query
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