Invention Grant
- Patent Title: Top coat composition
- Patent Title (中): 上衣组合
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Application No.: US13139641Application Date: 2009-12-11
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Publication No.: US08592508B2Publication Date: 2013-11-26
- Inventor: Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
- Applicant: Haruhiko Komoriya , Shinichi Sumida , Kenjin Inomiya , Takashi Mori , Takamasa Kitamoto , Yusuke Kanto
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-319028 20081215
- International Application: PCT/JP2009/070725 WO 20091211
- International Announcement: WO2010/071081 WO 20100624
- Main IPC: C09D133/16
- IPC: C09D133/16

Abstract:
Disclosed is a top coat composition for photoresist, which is characterized by containing a fluorinated polymer having a repeating unit represented by general formula (5). In the formula, R1 represents a hydrogen atom, a methyl group, a fluorine atom, or a trifluoromethyl group; n represents 0 or 1; m represents an integer of 1 to (3+n); and R2 or R3 represents a hydrogen atom or a protecting group. The top coat composition has a proper degree of solubility in a developing solution.
Public/Granted literature
- US20110245395A1 Top Coat Composition Public/Granted day:2011-10-06
Information query
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