Invention Grant
US08592540B2 Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same 有权
含氟化合物,含氟聚合物化合物,抗蚀剂组合物和使用其的图案化方法

Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same
Abstract:
There is disclosed a fluorine-containing polymer compound comprising a repeating unit (a) of the following general formula (2) and having a weight-average molecular weight of 1000 to 1000000 where R1 represents a polymerizable double bond-containing group; R2 represents a fluorine atom or a fluorine-containing alkyl group; R3 represents a hydrogen atom, an acid labile group, a cross-linking site or the other monovalent organic group; and W1 represents a linking moiety. When the fluorine-containing polymer compound is used in a resist compound for pattern formation by high energy radiation of 300 nm or less wavelength or electron beam radiation, it is possible to form a resist pattern with a good rectangular profile.
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