Invention Grant
US08592540B2 Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same
有权
含氟化合物,含氟聚合物化合物,抗蚀剂组合物和使用其的图案化方法
- Patent Title: Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same
- Patent Title (中): 含氟化合物,含氟聚合物化合物,抗蚀剂组合物和使用其的图案化方法
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Application No.: US13141945Application Date: 2009-12-15
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Publication No.: US08592540B2Publication Date: 2013-11-26
- Inventor: Kazunori Mori , Yuji Hagiwara , Yoshimi Isono , Satoru Narizuka , Kazuhiko Maeda
- Applicant: Kazunori Mori , Yuji Hagiwara , Yoshimi Isono , Satoru Narizuka , Kazuhiko Maeda
- Applicant Address: JP Ube-shi
- Assignee: Central Glass Company, Limited
- Current Assignee: Central Glass Company, Limited
- Current Assignee Address: JP Ube-shi
- Agency: Crowell & Moring LLP
- Priority: JP2008-329453 20081225
- International Application: PCT/JP2009/070865 WO 20091215
- International Announcement: WO2010/073934 WO 20100701
- Main IPC: C08F18/20
- IPC: C08F18/20 ; C08F20/22 ; G03F7/004

Abstract:
There is disclosed a fluorine-containing polymer compound comprising a repeating unit (a) of the following general formula (2) and having a weight-average molecular weight of 1000 to 1000000 where R1 represents a polymerizable double bond-containing group; R2 represents a fluorine atom or a fluorine-containing alkyl group; R3 represents a hydrogen atom, an acid labile group, a cross-linking site or the other monovalent organic group; and W1 represents a linking moiety. When the fluorine-containing polymer compound is used in a resist compound for pattern formation by high energy radiation of 300 nm or less wavelength or electron beam radiation, it is possible to form a resist pattern with a good rectangular profile.
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