Invention Grant
- Patent Title: Pyroelectric detector, pyroelectric detection device, and electronic instrument
- Patent Title (中): 热电探测器,热电检测装置和电子仪器
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Application No.: US13371648Application Date: 2012-02-13
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Publication No.: US08592937B2Publication Date: 2013-11-26
- Inventor: Takafumi Noda
- Applicant: Takafumi Noda
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2011-036671 20110223
- Main IPC: H01L35/00
- IPC: H01L35/00

Abstract:
A pyroelectric detector includes a substrate, a support member and a pyroelectric detection element, which includes a capacitor, first and second reducing gas barrier layers, an insulating layer, a plug and a second electrode wiring layer. The first reducing gas barrier layer covers at least a second electrode and a pyroelectric body of the capacitor, and has a first opening that overlaps the second electrode in plan view. The insulating layer covers at least the first reducing gas barrier layer, and has a second opening that overlaps the first opening in plan view. The plug is disposed in the first and second openings and connected to the second electrode. The second electrode wiring layer is formed on the insulating layer and connected to the plug. The second reducing gas barrier layer is formed on the insulating layer and the second electrode wiring layer and covers at least the plug.
Public/Granted literature
- US20120211857A1 PYROELECTRIC DETECTOR, PYROELECTRIC DETECTION DEVICE, AND ELECTRONIC INSTRUMENT Public/Granted day:2012-08-23
Information query
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