Invention Grant
- Patent Title: Resonator with a fluid cavity therein
- Patent Title (中): 谐振器内有流体腔
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Application No.: US13434144Application Date: 2012-03-29
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Publication No.: US08593037B1Publication Date: 2013-11-26
- Inventor: Randall L. Kubena , Tsung-Yuan Hsu
- Applicant: Randall L. Kubena , Tsung-Yuan Hsu
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/047 ; H01L41/107 ; H01L41/113 ; G01P3/26 ; G01L7/00

Abstract:
A quartz resonator flow cell has a piezoelectric quartz wafer with an electrode, pads, and interconnects disposed on a first side thereof. The piezoelectric quartz wafer has a second electrode disposed on a second side thereof, the second electrode opposing the first electrode. A substrate is provided having fluid ports therein and the piezoelectric quartz wafer is mounted to the substrate such that the second side thereof faces the substrate with a cavity being formed between the substrate and the wafer. The fluid ports in the substrate are aligned with the electrode on the second side of the piezoelectric quartz wafer which is in contact with the cavity.
Information query
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